Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538296 | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore | — | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538296 | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore | — | 2003-03-25 |