Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660083 | Method of epitaxially growing device structures with submicron group III nitride layers utilizing HVPE | Denis Tsvetkov, Vladimir A. Dmitriev | 2003-12-09 |
| 6656272 | Method of epitaxially growing submicron group III nitride layers utilizing HVPE | Denis Tsvetkov, Vladimir A. Dmitriev | 2003-12-02 |
| 6573164 | Method of epitaxially growing device structures with sharp layer interfaces utilizing HVPE | Denis Tsvetkov, Vladimir A. Dmitriev | 2003-06-03 |