Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555701 | CVD material compound and method for manufacturing the same and CVD method of ruthenium or ruthenium compound thin film | Masayuki Saito, Koji Okamoto, Hiroaki Suzuki | 2003-04-29 |