Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6527918 | Method and apparatus for low voltage plasma doping using dual pulses | Matthew J. Goeckner | 2003-03-04 |
| 6528805 | Dose monitor for plasma doping system | Matthew J. Goeckner | 2003-03-04 |