Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600228 | Keyhole at the top metal level prefilled with photoresist to prevent passivation damage even for a severe top metal rule | Min-Hsiung Chiang, Jenn Ming Huang | 2003-07-29 |
| 6586162 | Simple photo development step to form TiSix gate in DRAM process | — | 2003-07-01 |
| 6555435 | Method to eliminate shorts between adjacent contacts due to interlevel dielectric voids | Ming-Hsiung Chiang, James Wu | 2003-04-29 |