Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6543988 | Apparatus for clamping and transporting a semiconductor wafer | Cheng-Chieh Hung, Yu Fu, Weng-Liang Fang | 2003-04-08 |
| 6546307 | Method and apparatus for detecting proper orientation of a semiconductor wafer in a wafer transfer system | — | 2003-04-08 |