Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605812 | Method reducing the effects of N2 gas contamination in an ion implanter | Chi-Bing Chen, Cheng-Yi Huang, Chao-Jie Tsai, Lu Chen, Hsing-Jui Lee | 2003-08-12 |
| 6530103 | Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum pad | Jeng-Yang Pan, Chia-Chun Wu, Wen-Fang Tang, Huai-Tei Yang | 2003-03-11 |