Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660436 | OPC-like repair method for attenuated phase shift masks | Wen-Hong Huang, Wen-Reng Huang | 2003-12-09 |
| 6555277 | Quartz damage repair method for high-end mask | Tzy-Ying Lin, Wen-Rong Huang | 2003-04-29 |