Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665168 | Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefrom | — | 2003-12-16 |
RL
Ruey Horng Lin
Overall (2003): #126,464 of 273,478Top 50%
1
Patents 2003