Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573188 | End point detection method for forming a patterned silicon layer | Tsung-Mu Lai, Wan-Sheng Tseng | 2003-06-03 |
| 6534405 | Method of forming a MOSFET device featuring a dual salicide process | — | 2003-03-18 |