Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624073 | Optimized TaCN thin film diffusion barrier for copper metallization | Shi-Chung Sun | 2003-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624073 | Optimized TaCN thin film diffusion barrier for copper metallization | Shi-Chung Sun | 2003-09-23 |