Issued Patents 2003
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670103 | Method for forming lightly doped diffusion regions | — | 2003-12-30 |
| 6638441 | Method for pitch reduction | Wei-Ming Chung | 2003-10-28 |
| 6632587 | Method of enhancing photoresist anti-etching ability | — | 2003-10-14 |
| 6613499 | Development method for manufacturing semiconductors | — | 2003-09-02 |
| 6607674 | Method of repairing a phase shifting mask | — | 2003-08-19 |
| 6579810 | Method of removing a photoresist layer on a semiconductor wafer | — | 2003-06-17 |
| 6576515 | Method of forming transistor gate | — | 2003-06-10 |
| 6569761 | Method for shrinking critical dimension | — | 2003-05-27 |
| 6562691 | Method for forming protrusive alignment-mark | Wei-Hwa Sheu | 2003-05-13 |
| 6562144 | Wafer cleaning method | — | 2003-05-13 |
| 6555468 | Method for forming trench including a first and a second layer of photoresist | — | 2003-04-29 |
| 6548384 | Method for performing lithographic process to a multi-layered photoresist layer | — | 2003-04-15 |
| 6547647 | Method of wafer reclaim | — | 2003-04-15 |
| 6541828 | Non-volatile memory device used for non-overlapping implant | — | 2003-04-01 |
| 6534407 | Method for reducing dishing effects during a chemical mechanical polishing process | — | 2003-03-18 |
| 6518125 | Method for forming flash memory with high coupling ratio | — | 2003-02-11 |