Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653029 | Dual-focused ion beams for semiconductor image scanning and mask repair | Chuan-Yuan Lin, Chang-Cheng Hung, Chih-Cheng Chin | 2003-11-25 |
| 6638879 | Method for forming nitride spacer by using atomic layer deposition | Jung-Yu Hsieh | 2003-10-28 |