Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632749 | Method for manufacturing silicon oxide film, method for manufacturing semiconductor device, semiconductor device, display device and infrared light irradiating device | Mitsutoshi Miyasaka | 2003-10-14 |
| 6517422 | Polishing apparatus and method thereof | Shinya Kawamoto, Katsuaki Kotari, Katsuyoshi Kojima, Masayoshi Saitou, Yoshihiko Hoshi | 2003-02-11 |