Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569237 | Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer | Toshiaki Ono, Eiichi Asayama | 2003-05-27 |
| 6514335 | High-quality silicon single crystal and method of producing the same | Kazuyuki Egashira, Masahiko Okui, Manabu Nishimoto, Shunji Kuragaki, Takayuki Kubo +3 more | 2003-02-04 |