Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639686 | METHOD OF AND APPARATUS FOR REAL-TIME CONTINUAL NANOMETER SCALE POSITION MEASUREMENT BY BEAM PROBING AS BY LASER BEAMS AND THE LIKE OF ATOMIC AND OTHER UNDULATING SURFACES SUCH AS GRATINGS OR THE LIKE RELATIVELY MOVING WITH RESPECT TO THE PROBING BEAMS | — | 2003-10-28 |