Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602802 | Method of forming a porous film on a substrate | — | 2003-08-05 |
| 6558756 | Method of forming interlayer insulating film | Gaku Sugahara, Koji Arai, Kazuyuki Sawada | 2003-05-06 |
| 6545361 | Semiconductor device having multilevel interconnection structure and method for fabricating the same | Tetsuya Ueda, Eiji Tamaoka | 2003-04-08 |