Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624462 | Dielectric film and method of fabricating the same | Naoki Kohara, Taisuke Sawada, Takeshi Uenoyama | 2003-09-23 |
| 6577386 | Method and apparatus for activating semiconductor impurities | Akihisa Yoshida, Masao Uchida, Makoto Kitabatake, Tsuneo Mitsuyu | 2003-06-10 |
| 6518494 | Silicon structure, method for producing the same, and solar battery using the silicon structure | Munehiro Shibuya, Yuuji Mukai, Akihisa Yoshida | 2003-02-11 |