Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6548825 | Semiconductor device including barrier layer having dispersed particles | Shigeo Yoshii, Kiyoshi Morimoto, Haruyuki Sorada | 2003-04-15 |
| 6541278 | Method of forming film for semiconductor device with supercritical fluid | Takashi Ohtsuka, Michihito Ueda | 2003-04-01 |
| 6538297 | Magneto-resistive device and magneto-resistive effect type storage device | Akihiro Odagawa, Hiroshi Sakakima | 2003-03-25 |
| 6503360 | Etching method and apparatus | — | 2003-01-07 |