Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528397 | Semiconductor thin film, method of producing the same, apparatus for producing the same, semiconductor device and method of producing the same | Yoshinao Taketomi, Keizaburo Kuramasu, Masumi Izuchi, Hiroshi Tsutsu, Hikaru Nishitani +3 more | 2003-03-04 |