Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633047 | Apparatus and method for introducing impurity | Masahiko Niwayama, Kenji Yoneda | 2003-10-14 |
| 6589827 | Semiconductor device and method for fabricating the same | Kenji Yoneda | 2003-07-08 |