Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650960 | Machining control system | Yoshiaki Kakino, Tomonori Sato, Makoto Fujishima, Hisashi Otsubo, Yoshinori Yamaoka | 2003-11-18 |
| 6632746 | Etching method, semiconductor and fabricating method for the same | Kenshi Kanegae, Shinichi Imai | 2003-10-14 |
| 6562710 | Semiconductor device and method for fabricating the same | Reiko Hinogami, Eiji Tamaoka | 2003-05-13 |
| 6551033 | Tapping apparatus and method | Yoshiaki Kakino, Makoto Fujishima, Hisashi Otsubo, Torao Takeshita, Yoshinori Yamaoka | 2003-04-22 |
| 6531402 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | — | 2003-03-11 |
| 6524948 | Semiconductor device and method for fabricating the same | Eiji Tamaoka | 2003-02-25 |
| 6518191 | Method for etching organic film, method for fabricating semiconductor device and pattern formation method | — | 2003-02-11 |
| 6514647 | Photomask, resist pattern formation method, method of determining alignment accuracy and method of fabricating semiconductor device | Reiko Hinogami, Hisashi Watanabe | 2003-02-04 |
| 6514873 | Method for fabricating semiconductor device | Eiji Tamaoka | 2003-02-04 |