Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663708 | Silicon wafer, and manufacturing method and heat treatment method of the same | Etsuro Morita, Takaaki Shiota, Yoshinobu Nakada, Hisashi Furuya, Hiroshi Koya +3 more | 2003-12-16 |