Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638836 | Process for manufacturing a group comprising at least two elements, one whereof includes an encapsulated micro-integrated structure, and thereby obtained group | Bruno Murari, Benedetto Vigna, Francesco Ratti, Alberto Alessandri | 2003-10-28 |
| 6587312 | Structure for electrically connecting microelectromechanical devices, in particular microactuators for hard disk drivers | Bruno Murari, Benedetto Vigna | 2003-07-01 |
| 6508124 | Microelectromechanical structure insensitive to mechanical stresses | Sarah Zerbini, Benedetto Vigna | 2003-01-21 |