Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642121 | Control of amount and uniformity of oxidation at the interface of an emitter region of a monocrystalline silicon wafer and a polysilicon layer formed by chemical vapor deposition | Cateno Marco Camalleri, Simona Lorenti, Denise Cali′, Giuseppe Ferla | 2003-11-04 |