Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653247 | Dielectric layer for a semiconductor device and method of producing the same | — | 2003-11-25 |
| 6640840 | Delivery of liquid precursors to semiconductor processing reactors | — | 2003-11-04 |
| 6627535 | Methods and apparatus for forming a film on a substrate | Robert John Wilby, Knut Beekman | 2003-09-30 |