Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637473 | Automated storage and retrieval device and method | Brian L. Ganz, John Andrew Moulds, Chritopher T. Brovold, David Jewell, Mandel W. Mickley | 2003-10-28 |
| 6549279 | Method and apparatus for optical endpoint calibration in CMP | Robert A. Eaton, Charles Chen | 2003-04-15 |
| 6515493 | Method and apparatus for in-situ endpoint detection using electrical sensors | Thomas F. A. Bibby | 2003-02-04 |