TA

Tomohiro Aizawa

SC Speedfam Co.: 1 patents #1 of 10Top 10%
Overall (2003): #102,291 of 273,478Top 40%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6638147 Polishing method for removing corner material from a semi-conductor wafer Masami Shiino, Shinji Toda, Tsukasa Taniwaki 2003-10-28