YT

Yoshinobu Terui

SC Speedfam Clean System Co.: 1 patents #1 of 3Top 35%
Overall (2003): #85,424 of 273,478Top 35%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6618889 Disk-shaped workpiece washing apparatus Hiroji Sato, Noriaki Mizuno 2003-09-16