Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613697 | Low metallic impurity SiO based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereof | Maria Faur, Horia M. Faur | 2003-09-02 |
| 6593077 | Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrate | Maria Faur, Horia M. Faur | 2003-07-15 |