Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668905 | Aluminum nitride/aluminum base composite material and method of producing the same | Kei Takatsu, Shinsuke Hirano, Nobuyuki Suzuki | 2003-12-30 |
| 6645852 | Process for fabricating a semiconductor device having recess portion | Mitsuru Taguchi, Miyata Koji | 2003-11-11 |
| 6638848 | Method of etching insulating film and method of forming interconnection layer | Masanaga Fukasawa | 2003-10-28 |