Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667252 | Method of manufacturing compound semiconductor substrate | Takao Miyajima, Akira Usui | 2003-12-23 |
| 6576533 | Method of forming semiconductor thin film of group III nitride compound semiconductor. | Kenji Funato | 2003-06-10 |
| 6577662 | Semiconductor laser, and manufacturing method thereof, semiconductor device and manufacturing method thereof | Takeharu Asano, Masao Ikeda, Tsuyoshi Tojo | 2003-06-10 |