Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653212 | Method and apparatus for thin-film deposition, and method of manufacturing thin-film semiconductor device | Hisayoshi Yamoto | 2003-11-25 |
| 6645835 | Semiconductor film forming method and manufacturing method for semiconductor devices thereof | Hisayoshi Yamoto, Hajime Yagi, Yuuichi Sato | 2003-11-11 |
| 6592771 | Vapor-phase processing method and apparatus therefor | Kikuo Kaise | 2003-07-15 |
| 6521525 | Electro-optic device, drive substrate for electro-optic device and method of manufacturing the same | Hisayoshi Yamoto, Yuichi Satou, Hajime Yagi | 2003-02-18 |
| 6504215 | Electro-optical apparatus having a display section and a peripheral driving circuit section | Hisayoshi Yamoto, Yuichi Satou, Hajime Yagi | 2003-01-07 |