Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622368 | Method of manufacturing a transducer having a diaphragm with a predetermined tension | Pirmin Rombach | 2003-09-23 |
| 6522762 | Silicon-based sensor system | Jochen Kuhmann, Peter Scheel | 2003-02-18 |