Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653197 | Method for fabricating capacitor of semiconductor device | Kwang Jun Cho, Jong Min Lee | 2003-11-25 |
| 6635524 | Method for fabricating capacitor of semiconductor memory device | Ki-Seon Park | 2003-10-21 |
| 6632683 | Method for forming a capacitor of a semiconductor device | Ho-Jung Sun | 2003-10-14 |
| 6607963 | Method for forming capacitor of semiconductor device | Han-Sang Song | 2003-08-19 |
| 6589886 | Method for manufacturing aluminum oxide film for use in a semiconductor device | Min Soo Kim, Chan Lim, Heung Sik Kwak, Chung-Tae Kim | 2003-07-08 |
| 6559000 | Method of manufacturing a capacitor in a semiconductor device | Jong Min Lee, Chan Lim, Han-Sang Song | 2003-05-06 |
| 6537925 | Method for forming Ta2O5 dielectric layer using plasma enhanced atomic layer deposition | Jong Min Lee | 2003-03-25 |