Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6552337 | Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements | Kyoo-Chul Cho, Tae-Yeol Heo, Gi Jung Kim | 2003-04-22 |