Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509244 | Method for forming storage node electrode using a polysilicon hard mask on a sacrificial insulation film | Chang Il Kim | 2003-01-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509244 | Method for forming storage node electrode using a polysilicon hard mask on a sacrificial insulation film | Chang Il Kim | 2003-01-21 |