Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660391 | Low &kgr; dielectric inorganic/organic hybrid films and method of making | Peter Rose, Eugene Lopata | 2003-12-09 |
| 6539890 | Multiple source deposition plasma apparatus | — | 2003-04-01 |