Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579424 | Method for the production of substrates, magnetron source and sputter-coating chamber | Gerd Deppich, Karl-Heinz Schuller, Oliver Keitel | 2003-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579424 | Method for the production of substrates, magnetron source and sputter-coating chamber | Gerd Deppich, Karl-Heinz Schuller, Oliver Keitel | 2003-06-17 |