Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660082 | Method and apparatus for doping a melt with a dopant | Erich Gmeilbauer, Robert Vorbuchner, Walter Neumaier, Peter Vilzmann | 2003-12-09 |
| 6647641 | Device and method for the treatment of substrates in a fluid container | — | 2003-11-18 |
| 6539956 | Method and device for drying substrates | Klaus Conrad Wolke | 2003-04-01 |