Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632724 | Controlled cleaving process | Nathan W. Cheung | 2003-10-14 |
| 6582999 | Controlled cleavage process using pressurized fluid | Nathan W. Cheung | 2003-06-24 |
| 6558802 | Silicon-on-silicon hybrid wafer assembly | Nathan W. Cheung | 2003-05-06 |
| 6548382 | Gettering technique for wafers made using a controlled cleaving process | Nathan W. Cheung | 2003-04-15 |
| 6528391 | Controlled cleavage process and device for patterned films | Nathan W. Cheung | 2003-03-04 |
| 6526997 | Dry cleaning method for the manufacture of integrated circuits | — | 2003-03-04 |
| 6511899 | Controlled cleavage process using pressurized fluid | Nathan W. Cheung | 2003-01-28 |