Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625802 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | John E. Bjorkholm, Francisco Leon | 2003-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625802 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | John E. Bjorkholm, Francisco Leon | 2003-09-23 |