Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664010 | OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration | Marco Ahrens, Juergen Knobloch, Rainer Zimmermann | 2003-12-16 |