Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636655 | MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same | Terry Zhu | 2003-10-21 |
| 6555201 | Method for fabricating a microelectromechanical bearing | Vijayakumar R. Dhuler, David A. Koester, Karen W. Markus | 2003-04-29 |
| 6504968 | Optical switches including reflectors having associated actuators and latches located adjacent to a surface thereof and methods of operating same | Terry Zhu, John S. McKillop | 2003-01-07 |