Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620712 | Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications | Liji Huang, Naiqian Han, Gaofeng Wang | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620712 | Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications | Liji Huang, Naiqian Han, Gaofeng Wang | 2003-09-16 |