Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670269 | Method of forming through-hole or recess in silicon substrate | — | 2003-12-30 |
| 6661077 | Semiconductor device including primary connecting plug and an auxiliary connecting plug | — | 2003-12-09 |
| 6548891 | Semiconductor device and production process thereof | — | 2003-04-15 |
| 6545353 | Multilayer wiring board and semiconductor device | — | 2003-04-08 |
| 6507497 | Interposer for semiconductor, method for manufacturing the same and semiconductor device using such interposer | — | 2003-01-14 |