Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6578382 | Synthetic quartz glass for optical use, heat treatment method and heat treatment apparatus for the same | Tetsuji Ueda, Hiroyuki Nishimura | 2003-06-17 |
| 6541405 | Synthetic quartz glass member for excimer laser and method of making | Hisatoshi Otsuka, Kazuo Shirota | 2003-04-01 |
| 6508084 | Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace | Toru Yokota, Hiroyuki Nishimura | 2003-01-21 |