Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596086 | Apparatus for thin film growth | Takeshi Arai | 2003-07-22 |
| 6569239 | Silicon epitaxial wafer and production method therefor | Takeshi Arai, Hitoshi Habuka | 2003-05-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596086 | Apparatus for thin film growth | Takeshi Arai | 2003-07-22 |
| 6569239 | Silicon epitaxial wafer and production method therefor | Takeshi Arai, Hitoshi Habuka | 2003-05-27 |