Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659238 | Electromagnetic brake | Makoto Saito | 2003-12-09 |
| 6503363 | System for reducing wafer contamination using freshly, conditioned alkaline etching solution | Michito Sato, Brian West | 2003-01-07 |