Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589336 | Production method for silicon epitaxial wafer and silicon epitaxial wafer | Koji Ebara, Yasuo Kasahara | 2003-07-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589336 | Production method for silicon epitaxial wafer and silicon epitaxial wafer | Koji Ebara, Yasuo Kasahara | 2003-07-08 |